diff --git a/openlane/scripts/klayout/xor.drc b/openlane/scripts/klayout/xor.drc
index 30c33072d..36b957a0f 100755
--- a/openlane/scripts/klayout/xor.drc
+++ b/openlane/scripts/klayout/xor.drc
@@ -23,8 +23,11 @@ if !defined?(RBA)
     opts.on("-t", "--top TOP_CELL", "Top cell name (required)") do |top_cell|
       options[:top_cell] = top_cell
     end
-    opts.on("-T", "--threads THREAD_COUNT", "Thread count") do |threads|
-      options[:threads] = (threads or "1").to_i
+    opts.on("-t", "--tile-size TILE_SIZE", "Tile size (in µm)") do |tile_size|
+      options[:tile_size] = tile_size.to_i
+    end
+    opts.on("-n", "--threads THREAD_COUNT", "Lower bound on the thread count used by this process (+ managing threads)") do |threads|
+      options[:threads] = threads.to_i
     end
   end
   optparse.parse!
@@ -43,6 +46,7 @@ if !defined?(RBA)
     "-rd", "jobs=#{options[:threads]}",
     "-rd", "rdb_out=#{File.absolute_path(options[:rdb_out])}",
     "-rd", "ignore=#{options[:ignore]}",
+    "-rd", "tilesize=#{options[:tile_size]}",
   ]
   puts "Running: '#{args.join(" ")}'…"
   exec *args
@@ -52,10 +56,23 @@ end
 verbose
 
 # Run XOR
-$jobs = $jobs.to_i or 1
+if $jobs == ""
+  $jobs = "1"
+end
+$jobs = $jobs.to_i
+
 info "Using #{$jobs} threads…"
 threads($jobs)
 
+# Tiling
+if $tilesize == ""
+  $tilesize = "500"
+end
+$tilesize = $tilesize.to_i
+
+info "Using a tile size of (#{$tilesize} µm)²…"
+tiles($tilesize.um, $tilesize.um)
+
 # Set up inputs
 puts $a, $b
 a = source($a, $top_cell)
diff --git a/openlane/steps/klayout.py b/openlane/steps/klayout.py
index 7133fba75..df2ad76fc 100644
--- a/openlane/steps/klayout.py
+++ b/openlane/steps/klayout.py
@@ -257,9 +257,8 @@ class XOR(KLayoutStep):
     config_vars = KLayoutStep.config_vars + [
         Variable(
             "KLAYOUT_XOR_THREADS",
-            int,
-            "Specifies number of threads used in the KLayout XOR check.",
-            default=1,
+            Optional[int],
+            "Specifies number of threads used in the KLayout XOR check. If unset, this will be equal to your machine's thread count.",
         ),
         Variable(
             "KLAYOUT_XOR_IGNORE_LAYERS",
@@ -267,6 +266,12 @@ class XOR(KLayoutStep):
             "KLayout layers to ignore during XOR operations.",
             pdk=True,
         ),
+        Variable(
+            "KLAYOUT_XOR_TILE_SIZE",
+            Optional[int],
+            "A tile size for the XOR process in µm.",
+            pdk=True,
+        ),
     ]
 
     def run(self, state_in: State, **kwargs) -> Tuple[ViewsUpdate, MetricsUpdate]:
@@ -285,6 +290,12 @@ def run(self, state_in: State, **kwargs) -> Tuple[ViewsUpdate, MetricsUpdate]:
 
         kwargs, env = self.extract_env(kwargs)
 
+        tile_size_options = []
+        if tile_size := self.config["KLAYOUT_XOR_TILE_SIZE"]:
+            tile_size_options += ["--tile-size", str(tile_size)]
+
+        thread_count = self.config["KLAYOUT_XOR_THREADS"] or os.cpu_count() or 1
+
         self.run_subprocess(
             [
                 "ruby",
@@ -298,12 +309,13 @@ def run(self, state_in: State, **kwargs) -> Tuple[ViewsUpdate, MetricsUpdate]:
                 "--top",
                 self.config["DESIGN_NAME"],
                 "--threads",
-                self.config["KLAYOUT_XOR_THREADS"],
+                thread_count,
                 "--ignore",
                 ignored,
                 layout_a,
                 layout_b,
-            ],
+            ]
+            + tile_size_options,
             env=env,
         )
 
diff --git a/test/steps/all b/test/steps/all
index 781cc7e11..aa2085a53 160000
--- a/test/steps/all
+++ b/test/steps/all
@@ -1 +1 @@
-Subproject commit 781cc7e119a0e0e723ca206d96ebfc1b5f8fa860
+Subproject commit aa2085a53ea152f4b4a3bc5da8684e1653cc1cbd