diff --git a/CMakeLists.txt b/CMakeLists.txt
index 025d6c22..17185468 100644
--- a/CMakeLists.txt
+++ b/CMakeLists.txt
@@ -63,5 +63,7 @@ if(${SUBSTRAIT_CPP_BUILD_TESTING})
   enable_testing()
 endif()
 
+install(EXPORT SubstraitTargets DESTINATION lib/cmake/Substrait)
+
 add_subdirectory(src/substrait)
 add_subdirectory(export)
diff --git a/export/planloader/CMakeLists.txt b/export/planloader/CMakeLists.txt
index 2d64b68f..e08e839c 100644
--- a/export/planloader/CMakeLists.txt
+++ b/export/planloader/CMakeLists.txt
@@ -10,5 +10,3 @@ if(${SUBSTRAIT_CPP_BUILD_TESTING})
 endif()
 
 install(TARGETS planloader EXPORT SubstraitTargets)
-
-install(EXPORT SubstraitTargets DESTINATION lib/cmake/Substrait)
diff --git a/src/substrait/common/CMakeLists.txt b/src/substrait/common/CMakeLists.txt
index b7e7dcd4..70a1fc6a 100644
--- a/src/substrait/common/CMakeLists.txt
+++ b/src/substrait/common/CMakeLists.txt
@@ -1,11 +1,14 @@
 # SPDX-License-Identifier: Apache-2.0
 
 add_library(substrait_common Exceptions.cpp)
+target_sources(
+  substrait_common PUBLIC FILE_SET HEADERS BASE_DIRS ../../../include/ FILES
+                          ../../../include/substrait/common/Exceptions.h)
 target_link_libraries(substrait_common fmt::fmt-header-only)
 
 add_library(substrait_io STATIC Io.cpp)
-set_target_properties(
-  substrait_io PROPERTIES PUBLIC_HEADER ../../../include/substrait/common/Io.h)
+target_sources(substrait_io PUBLIC FILE_SET HEADERS BASE_DIRS ../../../include/
+                                   FILES ../../../include/substrait/common/Io.h)
 
 add_dependencies(
   substrait_io
@@ -32,7 +35,6 @@ add_executable(plantransformer PlanTransformerTool.cpp)
 target_link_libraries(plantransformer substrait_io)
 
 install(
-  TARGETS substrait_common substrait_io
+  TARGETS substrait_common substrait_io plantransformer
   EXPORT SubstraitTargets
-  LIBRARY
-  PUBLIC_HEADER DESTINATION "${CMAKE_INSTALL_INCLUDEDIR}/substrait/common")
+  LIBRARY FILE_SET HEADERS)
diff --git a/src/substrait/expression/CMakeLists.txt b/src/substrait/expression/CMakeLists.txt
index 768a9c76..9b1703b2 100644
--- a/src/substrait/expression/CMakeLists.txt
+++ b/src/substrait/expression/CMakeLists.txt
@@ -1,6 +1,10 @@
 # SPDX-License-Identifier: Apache-2.0
 
 add_library(substrait_expression DecimalLiteral.cpp)
+target_sources(
+  substrait_expression
+  PUBLIC FILE_SET HEADERS BASE_DIRS ../../../include/ FILES
+         ../../../include/substrait/expression/DecimalLiteral.h)
 
 target_link_libraries(substrait_expression substrait_proto absl::numeric
                       absl::strings)
@@ -9,4 +13,7 @@ if(${SUBSTRAIT_CPP_BUILD_TESTING})
   add_subdirectory(tests)
 endif()
 
-install(TARGETS substrait_expression EXPORT SubstraitTargets)
+install(
+  TARGETS substrait_expression
+  EXPORT SubstraitTargets
+  FILE_SET HEADERS)
diff --git a/src/substrait/function/CMakeLists.txt b/src/substrait/function/CMakeLists.txt
index b67f89ad..352ff43e 100644
--- a/src/substrait/function/CMakeLists.txt
+++ b/src/substrait/function/CMakeLists.txt
@@ -3,6 +3,17 @@
 set(FUNCTION_SRCS Function.cpp Extension.cpp FunctionLookup.cpp)
 
 add_library(substrait_function ${FUNCTION_SRCS})
+target_sources(
+  substrait_function
+  PUBLIC FILE_SET
+         HEADERS
+         BASE_DIRS
+         ../../../include/
+         FILES
+         ../../../include/substrait/function/Extension.h
+         ../../../include/substrait/function/Function.h
+         ../../../include/substrait/function/FunctionLookup.h
+         ../../../include/substrait/function/FunctionSignature.h)
 
 target_link_libraries(substrait_function substrait_type yaml-cpp)
 
@@ -10,4 +21,7 @@ if(${SUBSTRAIT_CPP_BUILD_TESTING})
   add_subdirectory(tests)
 endif()
 
-install(TARGETS substrait_function EXPORT SubstraitTargets)
+install(
+  TARGETS substrait_function
+  EXPORT SubstraitTargets
+  FILE_SET HEADERS)
diff --git a/src/substrait/proto/CMakeLists.txt b/src/substrait/proto/CMakeLists.txt
index 2b55fe3e..c6efa852 100644
--- a/src/substrait/proto/CMakeLists.txt
+++ b/src/substrait/proto/CMakeLists.txt
@@ -77,11 +77,17 @@ foreach(PROTO_FILE IN LISTS PROTOBUF_FILELIST)
 endforeach()
 
 # Add the generated protobuf C++ files to our exported library.
-add_library(substrait_proto ${PROTO_SRCS} ${PROTO_HDRS} ProtoUtils.cpp
-                            ProtoUtils.h)
+add_library(substrait_proto ${PROTO_SRCS} ${PROTO_HDRS} ProtoUtils.cpp)
 target_sources(
-  substrait_proto PUBLIC FILE_SET HEADERS BASE_DIRS
-                         ${PROTO_OUTPUT_TOPLEVEL_DIR} FILES ${PROTO_HDRS})
+  substrait_proto
+  PUBLIC FILE_SET
+         HEADERS
+         BASE_DIRS
+         ${PROTO_OUTPUT_TOPLEVEL_DIR}/src
+         ../..
+         FILES
+         ${PROTO_HDRS}
+         ProtoUtils.h)
 
 # Include the protobuf library as a dependency to use this class.
 target_link_libraries(substrait_proto protobuf::libprotobuf)
@@ -97,5 +103,4 @@ target_include_directories(
 install(
   TARGETS substrait_proto
   EXPORT SubstraitTargets
-  LIBRARY FILE_SET HEADERS
-          DESTINATION "${CMAKE_INSTALL_INCLUDEDIR}/substrait/proto")
+  LIBRARY FILE_SET HEADERS)
diff --git a/src/substrait/textplan/converter/CMakeLists.txt b/src/substrait/textplan/converter/CMakeLists.txt
index 1f4b7808..0dad7373 100644
--- a/src/substrait/textplan/converter/CMakeLists.txt
+++ b/src/substrait/textplan/converter/CMakeLists.txt
@@ -54,5 +54,6 @@ add_library(substrait_textplan_normalizer ${NORMALIZER_SRCS})
 target_link_libraries(substrait_textplan_normalizer
                       substrait_textplan_converter)
 
-install(TARGETS substrait_textplan_converter substrait_base_proto_visitor
-                substrait_textplan_normalizer EXPORT SubstraitTargets)
+install(TARGETS planconverter substrait_textplan_converter
+                substrait_base_proto_visitor substrait_textplan_normalizer
+        EXPORT SubstraitTargets)
diff --git a/src/substrait/textplan/parser/CMakeLists.txt b/src/substrait/textplan/parser/CMakeLists.txt
index 7eceac33..e593908e 100644
--- a/src/substrait/textplan/parser/CMakeLists.txt
+++ b/src/substrait/textplan/parser/CMakeLists.txt
@@ -44,4 +44,4 @@ if(${SUBSTRAIT_CPP_BUILD_TESTING})
   add_subdirectory(tests)
 endif()
 
-install(TARGETS substrait_textplan_loader EXPORT SubstraitTargets)
+install(TARGETS planparser substrait_textplan_loader EXPORT SubstraitTargets)
diff --git a/src/substrait/type/CMakeLists.txt b/src/substrait/type/CMakeLists.txt
index 75c8eaec..f43daaff 100644
--- a/src/substrait/type/CMakeLists.txt
+++ b/src/substrait/type/CMakeLists.txt
@@ -3,6 +3,9 @@
 set(TYPE_SRCS Type.cpp)
 
 add_library(substrait_type ${TYPE_SRCS})
+target_sources(
+  substrait_type PUBLIC FILE_SET HEADERS BASE_DIRS ../../../include/ FILES
+                        ../../../include/substrait/type/Type.h)
 
 target_link_libraries(substrait_type substrait_common)
 
@@ -10,4 +13,7 @@ if(${SUBSTRAIT_CPP_BUILD_TESTING})
   add_subdirectory(tests)
 endif()
 
-install(TARGETS substrait_type EXPORT SubstraitTargets)
+install(
+  TARGETS substrait_type
+  EXPORT SubstraitTargets
+  FILE_SET HEADERS)