-
Notifications
You must be signed in to change notification settings - Fork 1
/
Copy pathPSI1D_Sputtering.h
63 lines (44 loc) · 1.88 KB
/
PSI1D_Sputtering.h
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
27
28
29
30
31
32
33
34
35
36
37
38
39
40
41
42
43
44
45
46
47
48
49
50
51
52
53
54
55
56
57
58
59
60
61
62
63
/* ==============================================================
Subroutine to evaluate sputtering yeilds of any
monoatomic target material due to Physical Sputtering
Ref: Subroutines for some plasma surface interaction processes:
hpysical sputtering, chemical erosion, radiation enhanced
sublimation, backscattering and thermal evaporation.
!!! 戴舒宇和桑超峰的程序,靶板密度的单位不一样,桑超峰的是g/cm^3,戴书宇的是atoms/Ai^3 (Ai = 10^-10 m)
!!! 此处是改自psic/physput.f
================================================================*/
#ifndef PSI1D_SPUTTERING_H
#define PSI1D_SPUTTERING_H
#include <vector>
class PSI1D_Sputtering
{
public:
//! Constructor for Collisions between two species
PSI1D_Sputtering(
double an1_in,
double am1_in,
double an2_in,
double am2_in,
double es_in,
double density_in );
~PSI1D_Sputtering();
// parameters for sputtering
double an1; // atomic number of incident atomic
double an2; // atomic number of target atomic
double am1; // atomic mass of incident atomic (amu)
double am2; // atomic mass of target atomic (amu)
double es; //surface binding energy (heat of sublimation) of target (eV).
// W: 11.75(old value 8.68) C: 7.41
double density; // target density, unit: g/cm^3 (Ai = 10^-10 m)
// C: 2.248 g/cm^3, W: 19.35 g/cm^3
double n; // target number density, unit: atoms/Ai^3 (Ai = 10^-10 m) n = 1.0e-24 * density * NA / am2
double Ro; // n^(-1/3)
int ionflag; //ionflag -> flag for light/heavy ion.
//ionflag = 0 => light ion sputtering.
//ionflag = 1 => heavy ion sputtering.
double Q, eth,eth1, mu, etf, aL, Mratio;
void init();
double phy_sput_yield(double ke, double theta);
private:
};
#endif