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BIMORPH : MEMS microactuator based on silicon diaphragm with piezoceramic, Material properties via BIMORPH.MAT, piezo-electric BIMORPH microactuator

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Name		Name	Last commit message	Last commit date
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ANSYS		ANSYS
BOSCH		BOSCH
1992-09-29_Si-Membranen-Modalanalyse.pdf		1992-09-29_Si-Membranen-Modalanalyse.pdf
README.md		README.md

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BIMORPH

MEMS

MEMS microactuator based on silicon diaphragm with piezoceramic (PZT)
Material properties via BIMORPH.MAT
piezo-electric BIMORPH microactuator

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BIMORPH : MEMS microactuator based on silicon diaphragm with piezoceramic, Material properties via BIMORPH.MAT, piezo-electric BIMORPH microactuator

simulation sensor verification fem finite-elements piezo finite-element-analysis silicon mems finite-element-methods piezoelectric-sensors resonant-frequency bimorph microactuator

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