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microactuator

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ThomasFabula / BIMORPH

BIMORPH : MEMS microactuator based on silicon diaphragm with piezoceramic, Material properties via BIMORPH.MAT, piezo-electric BIMORPH microactuator

simulation sensor verification fem finite-elements piezo finite-element-analysis silicon mems finite-element-methods piezoelectric-sensors resonant-frequency bimorph microactuator

Updated Apr 17, 2024
GLSL

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