ANSYS(TM) FEM: multiphysics simulation of MEMS-sensors based on silicon with pizoelectric thin-film layers and etched quartz crystals
fem
finite-elements
piezo
finite-element-analysis
multiphysics
frequency-analysis
silicon
mems
finite-element-methods
ansys
thin-film
piezoelectric
zno
piezo-sensor
pzt
piezoelectric-materials
piezoelectric-sensors
aln
silizium
vibrit
-
Updated
Jul 15, 2024 - Roff