zinkoxid

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Papers, Publications & oral presentations

Analytical & numerical modeling of resonant Silicon Microsensors, invited paper Sensors & Materials

Aktoren-Antrieb mit piezoelektrische Duennschichten - ZnO/AlN, etc.

actuators silicon piezoelectric zno thinfilm zinkoxid aktor aktuator

FASENS: POLYTEC + GAIN-PHASE Messungen, Modenprofilaufnahme, Abgriff: optisch, Stahlträger geklebt. Si-Membran + ZnO-Schicht M7-2/3

experimental sensor frequency-analysis resonance silicon mems pressure-sensor zno bosch-sensor microsystems resonant-frequency zinkoxid

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